ecoSplit™ - Automatic singulation of sawn wafers

ACI-ecoTec GmbH has revolutionized the handling of raw wafers with its modular system, the ecoSplit™. On the 4th and 5th December 2007, ACI-ecotec GmbH launched the new generation of this system at the ‘tecDay’ event held in St.Georgen, Black Forest, Germany.

This unique solution from ACI has realized the automation of a key processing stage which until now could only be done manually. Stacks of up to 150 wafers are loaded into the machine for separation and wafers with sawing errors are automatically detected and removed allowing for continous operation of the machine.

During the live presentation of the ecoSplit™ the attendees were able to see for themselves how gentle the wafers are handled.

With a high throughput of 1200 wafers per hour (per splitter lane) and with very low breakage rates, the machine makes a very cost effective investment for wafer production.

The ecoSplit™ is presently available in 2 Standard configurations: [1] ecoSplit™C for separating of wafers into a carrier for batch processing, and [2] ecoSplit™I for separation of wafers into tracks for inline processes.

Overview of the advandages:
• Automatic separation of sawn raw wafers directly from the stack
• Separates wafers quickly without causing any stress to the wafers
• Separating rates: ecoSplit™C - 1200 wafers / hr. ecoSplit™I - 2800 wafers / hr.
• Very low breakage rate (< 0.3%)
• Wafer formats: 125mm (5“), 156mm (6“) und 210mm (8“)
• For use with wafers thicknesses down to 160µm (absolute)
• Reduced labor costs and higher wafer yields
• Optimised Cost-of-Ownership

For the respective product datasheets please contact ACI Marketing & Communication at (info@aci-ecotec.com)

Short company profile of ACI-ecoTec GmbH & Co. KG

“Innovative Automation and Process Engineering for Cost Effective Manufacturing”
Based in St. Georgen in Germany’s Black Forest, the Company is committed to the principle of innovation for the benefit of its customers. ACI-ecoTec develops and manufactures special purpose machinery to customer specific projects for automated process and production systems for the electronics, semiconductor, automotive,
pharmaceutical and medical, and photovoltaic industries. Systems are characterized as modular, standardized and process-oriented. With a total of 60 Employees the company has a turn-over of ca. 8 Million Euro.

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